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1

Contact Resistance Reduction Technology Using Aluminum Implant and Segregation for Strained p-FinFETs With Silicon–Germanium Source/Drain

Sinha, M., Lee, R.T.P., Eng Fong Chor, Yee-Chia Yeo

Journal:

IEEE Transactions on Electron Devices

Year:

2010

Language:

english

File:

PDF, 938 KB

english, 2010

2

[IEEE 2001 8th International Symposium on the Physical and Failure Analysis of Integrated Circuits. IPFA 2001 - Singapore (9-13 July 2001)] Proceedings of the 2001 8th International Symposium on the Physical and Failure Analysis of Integrated Circuits. IPFA 2001 (Cat. No.01TH8548) - Effects of electron-beam lithography on thin gate oxide reliability

Pei Fen Chong,, Byung Jin Cho,, Eng Fong Chor,, Moon Sig Joo,

Year:

2001

Language:

english

File:

PDF, 302 KB

english, 2001

3

Channel temperature measurements of In x Al 1−x N/GaN high electron mobility transistors on Si(111) using optical spectroscopy

Kyaw, Lwin Min, Bera, Lakshmi Kanta, Bhat, Thirumaleshwara N., Liu, Yi, Tan, Hui Ru, Dolmanan, Surani Bin, Chor, Eng Fong, Tripathy, Sudhiranjan

Journal:

Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures

Year:

2015

Language:

english

File:

PDF, 1.53 MB

english, 2015

4

Defect suppression of indium end-of-range during solid phase epitaxy annealing using Si1−yCy in silicon

Chung Foong Tan, Eng Fong Chor, Hyeokjae Lee, Jinping Liu, Elgin Quek, Lap Chan

Journal:

Thin Solid Films

Year:

2006

Language:

english

File:

PDF, 254 KB

english, 2006

5

Heterojunction Bipolar Transistor with an Additional Minority Carrier Reflection Barrier in the Emitter

Chor, Eng Fong, Peng, Cai Jun

Journal:

Japanese Journal of Applied Physics

Year:

1997

Language:

english

File:

PDF, 176 KB

english, 1997

6

Source/Drain Contact for Drive Current Enhancement in $P$-Channel

Sinha, M., Sinha, M., Lee, R.T.P., Kian-Ming Tan,, Guo-Qiang Lo,, Eng Fong Chor,, Yee-Chia Yeo,

Journal:

IEEE Electron Device Letters

Year:

2009

Language:

english

File:

PDF, 479 KB

english, 2009

7

Leakage suppression of gated diodes fabricated under low-temperature annealing with substitutional carbon Si/sub 1-y/C/sub y/ incorporation

Chung Foong Tan,, Eng Fong Chor,, Hyeokjae Lee,, Jinping Liu,, Quek, E., Lap Chan,

Journal:

IEEE Electron Device Letters

Year:

2005

Language:

english

File:

PDF, 252 KB

english, 2005

8

Influence of PECVD deposited SiN x passivation layer thickness on In 0.18 Al 0.82 N/GaN/Si HEMT

Singh, Sarab Preet, Liu, Yi, Ngoo, Yi Jie, Kyaw, Lwin Min, Bera, Milan Kumar, Dolmanan, S B, Tripathy, Sudhiranjan, Chor, Eng Fong

Journal:

Journal of Physics D Applied Physics

Year:

2015

Language:

english

File:

PDF, 1.07 MB

english, 2015

9

Surface smoothing of floating gates in flash memory devices via surface nitrogen and carbon incorporation

Cha, Cher-Liang, Chor, Eng-Fong, Gong, Hao, Bourdillon, Anthony J., Jia, Yu-Min, Pan, Jin-Sheng, Zhang, An-Qing, Chan, Lap

Journal:

Applied Physics Letters

Year:

1999

Language:

english

File:

PDF, 482 KB

english, 1999

10

Strong Low-Frequency Noise in Polysilicon Emitter Bipolar Transistors with Interfacial Oxide due to Fluctuations in Tunneling Probabilities

Lau, Wai Shing, Chor, Eng Fong, Foo, Chee Seng, Khoong, Wai Chee

Journal:

Japanese Journal of Applied Physics

Year:

1992

Language:

english

File:

PDF, 609 KB

english, 1992

11

Improved DC performance of AlGaN/GaN high electron mobility transistors using hafnium oxide for surface passivation

Chang Liu, Eng Fong Chor, Leng Seow Tan

Journal:

Thin Solid Films

Year:

2007

Language:

english

File:

PDF, 206 KB

english, 2007

12

Annealing Pressure and Ambient Dependent RuO x Schottky Contacts on InAlN/AlN/GaN-on-Si(111) Heterostructure

Kyaw, Lwin Min, Liu, Yi, Lai, Mei Ying, Bhat, Thirumaleshwara N., Tan, Hui Ru, Lim, Poh Chong, Tripathy, Sudhiranjan, Chor, Eng Fong

Journal:

ECS Journal of Solid State Science and Technology

Year:

2016

Language:

english

File:

PDF, 1.01 MB

english, 2016

13

Plasma etching optimization of oxide/nitride/oxide interpoly dielectric breakdown time in flash memory devices

Cher Liang Cha,, Eng Fong Chor,, Hao Gong,, An Qing Zhang,, Lap Chan,

Journal:

IEEE Transactions on Semiconductor Manufacturing

Year:

2000

Language:

english

File:

PDF, 153 KB

english, 2000

14

Band offset measurements of the pulsed-laser-deposition-grown Sc2O3 (111)/GaN (0001) heterostructure by X-ray photoelectron spectroscopy

Chang Liu, Eng Fong Chor, Leng Seow Tan, Yufeng Dong

Journal:

physica status solidi (c)

Year:

2007

Language:

english

File:

PDF, 295 KB

english, 2007

15

Fabrication of single-walled carbon nanotube Schottky diode with gold contacts modified by asymmetric thiolate molecules

Leihua Huang, Eng Fong Chor, Yihong Wu, Zaibing Guo

Journal:

Year:

2010

Language:

english

File:

PDF, 416 KB

english, 2010

16

Enhanced device performance of AlGaN/GaN HEMTs using HfO 2 high- k dielectric for surface passivation and gate oxide

Liu, Chang, Chor, Eng Fong, Tan, Leng Seow

Journal:

Semiconductor Science and Technology

Year:

2007

Language:

english

File:

PDF, 462 KB

english, 2007

17

Thermally robust RuO x Schottky diodes and HEMTs on III-nitrides

Kyaw, Lwin Min, Saju, Aju Abraham, Liu, Yi, Bera, Milan Kumar, Singh, Sarab Preet, Tripathy, Sudhiranjan, Chor, Eng Fong

Journal:

Physica status solidi

Year:

2014

Language:

english

File:

PDF, 777 KB

english, 2014

18

ANNEALING EFFECTS ON CONTACT PROPERTIES OF ALUMINUM DOPED ZINC OXIDE THIN FILMS

LOW, KE BIN, GONG, HAO, CHOR, ENG FONG

Journal:

International Journal of Modern Physics B

Year:

2002

Language:

english

File:

PDF, 791 KB

english, 2002

19

Impact of Al2O3 incorporation on device performance of HfO2 gate dielectric AlGaN/GaN MIS-HFETs

Feng Tian, Eng Fong Chor

Journal:

physica status solidi (c)

Year:

2010

Language:

english

File:

PDF, 158 KB

english, 2010

20

Investigation of Rh-based Schottky electrode on AlGaN/GaN heterostructure

Feng Tian, Eng Fong Chor

Journal:

physica status solidi (c)

Year:

2009

Language:

english

File:

PDF, 223 KB

english, 2009

21

[IEEE 2009 International Symposium on VLSI Technology, Systems, and Applications (VLSI-TSA) - Hsinchu, Taiwan (2009.04.27-2009.04.29)] 2009 International Symposium on VLSI Technology, Systems, and Applications - p-FinFETs with Al segregated NiSi/p+-Si source/drain contact junction for series resistance reduction

Sinha, Mantavya, Lee, Rinus T. P., Devi, Sivasubramaniam Nandini, Guo-Qiang Lo,, Eng Fong Chor,, Yee-Chia Yeo,

Year:

2009

Language:

english

File:

PDF, 313 KB

english, 2009

22

Structural and electrical characterizations of the pulsed-laser-deposition-grown Sc[sub 2]O[sub 3]∕GaN heterostructure

Liu, Chang, Chor, Eng Fong, Tan, Leng Seow, Dong, Yufeng

Journal:

Applied Physics Letters

Year:

2006

Language:

english

File:

PDF, 389 KB

english, 2006

23

Enhancing leakage suppression in carbon-rich silicon junctions

Chung Foong Tan,, Eng Fong Chor,, Hyeokjae Lee,, Quek, E., Lap Chan,

Journal:

IEEE Electron Device Letters

Year:

2006

Language:

english

File:

PDF, 140 KB

english, 2006

24

Investigations of HfO[sub 2]âAlGaNâGaN metal-oxide-semiconductor high electron mobility transistors

Liu, Chang, Chor, Eng Fong, Tan, Leng Seow

Journal:

Applied Physics Letters

Year:

2006

Language:

english

File:

PDF, 440 KB

english, 2006

25

[IEEE 7th International Conference on Solid-State and Integrated Circuits Technology, 2004. - Beijing, China (Oct. 18-21, 2004)] Proceedings. 7th International Conference on Solid-State and Integrated Circuits Technology, 2004. - Activation of beryllium-implanted gallium nitride by combined pulse laser and rapid thermal annealing

Leng Seow Tan,, Hai Ting Wang,, Eng Fong Chor,

Year:

2004

Language:

english

File:

PDF, 1024 KB

english, 2004

26

Low thermal budget Hf/Al/Ta ohmic contacts for InAlN/GaN-on-Si HEMTs with enhanced breakdown voltage

Liu, Yi, Singh, Sarab Preet, Ngoo, Yi Jie, Kyaw, Lwin Min, Bera, Milan Kumar, Lo, Quo Qiang, Chor, Eng Fong

Journal:

Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures

Year:

2014

Language:

english

File:

PDF, 1.77 MB

english, 2014

27

[ECS 215th ECS Meeting - San Francisco, CA (May 24 - May 29, 2009)] ECS Transactions - Integration of Al Segregated NiSiGe/SiGe Source/Drain Contact Technology in p-FinFETs for Drive Current Enhancement

Sinha, Mantavya, Lee, Rinus T. P., Devi, Sivasubramaniam Nandini, Lo, Guo-Qiang, Chor, Eng Fong, Yeo, Yee-Chia

Year:

2009

Language:

english

File:

PDF, 746 KB

english, 2009

28

Doping-free fabrication of n-type random network single-walled carbon nanotube field effect transistor with yttrium contacts

Leihua Huang, Eng Fong Chor, Yihong Wu

Journal:

Physica E: Low-dimensional Systems and Nanostructures

Year:

2011

Language:

english

File:

PDF, 889 KB

english, 2011

29

Effects of chemical and plasma surface treatments on the O2-annealed Ni/Au contact to p-Gan

Janis Lim, Eng Fong Chor, Leng Seow Tan

Journal:

Thin Solid Films

Year:

2007

Language:

english

File:

PDF, 263 KB

english, 2007

30

Electron-beam irradiation-induced gate oxide degradation

Cho, Byung Jin, Chong, Pei Fen, Chor, Eng Fong, Joo, Moon Sig, Yeo, In Seok

Journal:

Journal of Applied Physics

Year:

2000

Language:

english

File:

PDF, 387 KB

english, 2000

31

Achieving Sub-0.1 eV Hole Schottky Barrier Height for NiSiGe on SiGe by Aluminum Segregation

Sinha, Mantavya, Lee, Rinus T. P., Lohani, Anup, Mhaisalkar, Subodh, Chor, Eng Fong, Yeo, Yee-Chia

Journal:

Journal of The Electrochemical Society

Year:

2009

Language:

english

File:

PDF, 382 KB

english, 2009

32

Influence of substitutional carbon incorporation on implanted-indium-related defects and transient enhanced diffusion

Tan, Chung Foong, Chor, Eng Fong, Liu, Jinping, Lee, Hyeokjae, Quek, Elgin, Chan, Lap

Journal:

Applied Physics Letters

Year:

2003

Language:

english

File:

PDF, 434 KB

english, 2003

33

The Development of a Highly Selective K I / I 2 / H 2O / H 2S O 4 Etchant for the Selective Etching of A l 0.3G a 0.7 As over GaAs

Lau, Wai Shing, Chor, Eng Fong, Kek, Soon Poh, Aziz, Wan Hamzah bin Abdul, Lim, Hui Chin, Heng, Chun Huat, Zhao, Rong

Journal:

Japanese Journal of Applied Physics

Year:

1997

File:

PDF, 869 KB

1997

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